Temperature-dependent Photoluminescence Imaging using Non-uniform Excitation

S. Nie, Yan Zhu, O. Kunz, H. Kampwerth, T. Trupke, Z. Hameiri
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引用次数: 1

Abstract

Photoluminescence (PL) imaging is a powerful inspection technique for research laboratories and production lines. It is used for a wide range of applications across the entire manufacturing chain from bricks and ingots to modules. However, common PL imaging systems have three main limitations: (a) Due to the uniform illumination, the acquired images are affected by lateral carrier flow, resulting in image blurring; (b) sample's nonuniformity is measured at different injection levels; and (c) images are taken at room temperatures, although there is valuable information in temperature-dependent measurements. In this paper we present a novel temperature-dependent PL imaging system that is not affected by lateral balancing currents. By adaptively adjusting the light intensity at each pixel, we set a uniform excess carrier density across the sample. Hence, the lateral currents are eliminated. The non-uniformity of the material's electrical properties and temperature characteristics can then be extracted from the excitation image. The advantages of the proposed system are demonstrated using mono and multicrystalline silicon wafers. This novel approach presents a significant improvement in accuracy and resolution compared to conventional PL imaging techniques and is therefore, expected to be beneficial for any PL-based quantitative analysis.
使用非均匀激发的温度依赖性光致发光成像
光致发光(PL)成像是一种强大的检测技术的研究实验室和生产线。它被广泛用于从砖和锭到模块的整个制造链的应用。然而,常见的PL成像系统存在三个主要的局限性:(a)由于光照均匀,采集的图像受到横向载流子流的影响,导致图像模糊;(b)在不同注射水平下测量样品的不均匀性;(c)图像是在室温下拍摄的,尽管在温度相关的测量中有有价值的信息。在本文中,我们提出了一种不受横向平衡电流影响的新型温度相关PL成像系统。通过自适应调整每个像素处的光强度,我们在整个样品中设置了均匀的多余载流子密度。因此,横向电流被消除。然后可以从激发图像中提取材料电性能和温度特性的不均匀性。用单晶硅片和多晶硅片证明了该系统的优点。与传统的PL成像技术相比,这种新方法在精度和分辨率上有了显著的提高,因此,有望对任何基于PL的定量分析有益。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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