Comparison of ultrashort-pulse-laser ablation characteristics for different ceramics

Abstract

This paper analytically investigates the ultrashort-pulse-laser ablation characteristics for different ceramics. Ceramics processing is difficult due to its hard and brittle properties. Noncontact ultrashot-pulse-laser is widely recognized to be a applicable tool. The optical property, thermal conductivity, and thermal expansion coefficient of AhO3 Ceramics are obviously different from these of AlN ceramics and are significantly relevant to the ablation characteristics of these ceramics. Therefore, the ablation for Al2O3 and AlN ceramics is quantitatively analyzed in this study. The effects of the ceramics properties on the ablation characteristics are discussed by comparing the ablation of Al2O3 with AlN.