Perturbation Analysis of Nonlinearity in Radio Frequency Bulk Acoustic Wave Resonators Using Mass-Spring Model

Abstract

This paper describes derivation of an equivalent circuit for nonlinear responses in film bulk acoustic resonators from the first-order perturbation analysis using the piezoelectric constitutive equations with the h-form. For simplicity, electrodes and piezoelectric layer are regarded as a mass and spring in the derivation. Then it is demonstrated that the H2 response can be simulated well by the circuit.