Annealing Temperature Effect on the Physical Properties of Titanium Oxide Thin Films Prepared by the Sol-Gel Method

Abstract

In this work, the low-cost sol–gel, spin-coating technique was used to grow TiO2 thin films on silicon substrates. The influence of annealing temperature on the structural, morphological, and optical properties of TiO2 films is investigated. The structural properties of the TiO2 films are investigated by Raman and Fourier transform infrared (FTIR) Spectroscopy. Morphological properties are studied by Atomic Force Microscopy (AFM). The optical properties are examined by photoluminescence (PL) and ultraviolet-visible (UV-vis) spectroscopy.