{"title":"Using ElectroMechanical Buckling for Measuring Residual Stress","authors":"S. Abu-Salih, D. Elata","doi":"10.1109/ESIME.2006.1643991","DOIUrl":null,"url":null,"abstract":"In this work, a new test structure and method for measuring residual stress is presented. The test structure is a single clamped-clamped beam with electrodes symmetrically positioned along both sides of the beam. The electromechanical buckling response is used to measure the residual stress. It is shown that a single test structure of the proposed design may be used to measure both compressive and tensile residual stresses in a continuous wide range","PeriodicalId":60796,"journal":{"name":"微纳电子与智能制造","volume":"18 1","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2006-04-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"微纳电子与智能制造","FirstCategoryId":"1087","ListUrlMain":"https://doi.org/10.1109/ESIME.2006.1643991","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
In this work, a new test structure and method for measuring residual stress is presented. The test structure is a single clamped-clamped beam with electrodes symmetrically positioned along both sides of the beam. The electromechanical buckling response is used to measure the residual stress. It is shown that a single test structure of the proposed design may be used to measure both compressive and tensile residual stresses in a continuous wide range