Planar terahertz circuits using thin dielectric waveguides

Abstract

In this paper, the use of polymer-ceramic nanocomposites in the fabrication of THz planar circuits at the wafer-level is introduced. Thin ribbon dielectric waveguides (50∼60μm) made from SU-8 — Barium Titanate (BaTiO3) composites are used in the fabrication of THz ribbon waveguides and circuits. Details of material characteristics, fabrication process and an example power splitter circuit are presented.