Techniques of optical scanning microscopy

Abstract

We review the imaging properties and electrical applications o f scanning optical microscopes. We show that the choice of a scanning approach allows the modification of the optical system to give differential phase contrast imaging and confocal imaging. The latter has unique properties which permit the high resolution imaging and metrology of thick device structures. We also discuss the optical beam-induced current method of device, VLSI circuit and material testing and consider the factors affecting its resolution.