{"title":"Ion implantation in insulators","authors":"P. Townsend","doi":"10.1016/0029-554X(81)90802-8","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":100971,"journal":{"name":"Nuclear Instruments and Methods","volume":"22 1","pages":"727-732"},"PeriodicalIF":0.0000,"publicationDate":"1981-04-15","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"16","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Nuclear Instruments and Methods","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1016/0029-554X(81)90802-8","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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