High precision characterization of SAW materials and devices

M. Weihnacht, Kurt Dr. Franke, K. Kammer, R. Kunze, Hagen Schmidt
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引用次数: 3

Abstract

Three original methods, developed and used for the characterization of SAW materials and devices, are presented: an electric scanning force microscope, a laser induced SAW pulse propagation method, and an optical glass fibre interferometer. The electric scanning force microscope enables to map dielectric and piezoelectric properties in nanoscale. Two examples of its use in developing SAW thin film solutions are shown: PZT layers on Si and laser deposited LiNbO/sub 3/ layers on sapphire. The laser induced SAW pulse technique is shown to be a useful method to evaluate the mechanical properties of thin coatings in SAW preparation techniques and to determine unknown material constants of new substrate materials. The optical interferometer has been developed in such a way that the SAW velocity can be determined with an accuracy of 10/sup -5/ within transducer and reflector grating structures. This property has been used to determine the key parameters of potential materials for SAW waveguide resonator filters.
SAW材料和器件的高精度表征
本文介绍了三种用于SAW材料和器件表征的原始方法:电扫描力显微镜,激光诱导SAW脉冲传播方法和光学玻璃纤维干涉仪。电扫描力显微镜能够在纳米尺度上绘制介电和压电性质。在开发SAW薄膜解决方案方面的两个例子是:在Si上的PZT层和在蓝宝石上的激光沉积LiNbO/ sub3 /层。激光诱导声表面波脉冲技术是评价声表面波制备技术中薄涂层力学性能和确定新型衬底材料未知材料常数的有效方法。光学干涉仪已经发展到这样一种方式,即在换能器和反射器光栅结构中可以以10/sup -5/的精度确定SAW速度。利用这一特性确定了声波导谐振器滤波器潜在材料的关键参数。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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