A. Schönborn, J. Lindner, E. Kaat, H. Hubert, M. Grasserbauer, G. Friedbacher
{"title":"AES and SIMS profiling of buried silicide layers formed by 6 MeV high dose nickel implantation into silicon","authors":"A. Schönborn, J. Lindner, E. Kaat, H. Hubert, M. Grasserbauer, G. Friedbacher","doi":"10.1007/BF00572365","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":12372,"journal":{"name":"Fresenius' Zeitschrift für analytische Chemie","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"1989-01-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"5","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Fresenius' Zeitschrift für analytische Chemie","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1007/BF00572365","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}