Science of Sealing: Advanced Materials for High-Temperature Applications

Abstract

High temperature sealing performance is a need in semiconductor manufacturing processes. There can be significant performance differences even among perfluoroelastomers (FFKM) that are the most advanced class of rubber materials. The goal of this publication is to relate the temperature capability of four different FFKM materials to their underlying cross-link chemistry. This paper describes the long-term compression set method used to establish a material service temperature. Isothermal thermogravimetric analysis (TGA) is also explored as a method to establish material use temperature. The nature of the elastomer cross-link also has implications for plasma resistance and wet chemical compatibility and, taken together with thermal stability, represents a critical factor in choosing the appropriate elastomer sealing material.