IC Design & Technology Co-Development: e-NVM & mmWave enablement of 22FDX™ Technology

Abstract

In this contribution we present two cases of specialized variants for 22FDXTM technology in which detailed Design and Technology co-development is needed. (1) The e-NVM-variant perpendicular Spin Transfer Torque needed development of characterization techniques for the characterization of magnetic properties and STT-current and at the same time a demonstrator was developed that makes effective use of the Back-Biasing for leakage reduction. (2) Furthermore, the mmWave derivative requires characterization of functionality up to 100 GHz and far beyond, while at the same time showcases on 5G auto-radar and imaging radar could be started.