Integrated Sub-fab Monitoring System Improving DataVisibility and Abatement Uptime : Category: APC, EO, SM, DM

Abstract

The sub-fab, a sophisticated environment where vacuum and abatement systems are located, has evolved dramatically over the years. It became essential in supporting semiconductor chip manufacturing. Closely tied into the process tool safety system, the abatement and vacuum components have a direct influence on the fabrication uptime and yields. The already strong and further growing influence have led chip manufacturers to realize the significant value of adopting advanced monitoring and data analytics to optimize sub-fab operations. The value is proven by adoption of such systems for the main fabrication area over the last decade. This article presents an example of successful application of integrated sub-fab monitoring system at an R&D facility for both dry pumps and abatement systems. This implementation example successfully demonstrates excellent data visibility to all level users, quick data collection enabling significant reduction in troubleshooting time, initial reduction in unscheduled abatement down events, and ability to quickly obtain comprehensive historical data for abatement state comparison. The success of the monitoring implementation has led to planning of applying predictive health monitoring function to further increase of sub-fab equipment uptime.