Drive Dependence of Output Amplitude Stabilities in Weakly Coupled MEMS Resonators

Abstract

Amplitude stability is critical for mode-localized sensors with the output metric of such sensors being defined as an amplitude ratio. A systematic study of the drive dependence of the amplitude ratio metric has not been conducted previously. In this paper, we first report that the amplitude stability of the weakly coupled resonators can be improved using a dual-resonator drive method compared to a single-resonator drive method. Experimental validation on a weakly coupled MEMS resonator demonstrates that the normalized amplitude stability can be improved by a mean factor of ~2.9 using the dual-resonator drive method compared to the single-resonator drive method, without any degradation in the frequency stability.