Low Actuation Voltage Nano-Electro-Mechanical Switching Device for Ultra-Low Power Applications

Abstract

In this paper we propose a two-terminal diode type nano-electro-mechanical (NEM) switch with a low actuation voltage of about 2.5 V and sharp subthreshold slope of $\sim 2.4$ mV/decade obtained by reducing the air gap between electrodes. This type of switch will find applications in non-volatile memory, NEM resonators and sensors.