Manipulating and characterizing with nanorobotics: In-situ SEM technique for centimeter and millimeter waves

Abstract

Combining Scanning Electron Microscopy (SEM) and Microwave Microscopy is resulting in a hybrid microscope with multi-sensorial features. Parallelized measurements in the micro- and mm-wave region and manipulation of micro- and nano-scaled objects will be possible. Nanorobotic positioning stages with end-effectors inside the vacuum chamber of this microscope are controlled by an open-source automation software framework which also obtained live data and images of a Vector Network Analyzer (VNA) and the SEM.