A MEMS dedicated to the bio-components detection, inspired from the SON architecture

Abstract

The Silicon On Insulator technology has reached a new stage through the nanodevices way: Silicon On Nothing, where "Nothing" means a vacuum cavity underneath an ultrathin Si film. A mobile and thin semiconductor membrane results, by enlarging the cavity. In the empty space can be handled a bioliquid using a diffuser/nozzle micropump. The mobile Si membrane is bending by the substrate biasing and plays a double role: as actuator and detector. This paper presents a MEMS, based on a new work principle than traditional ISFETs, which detects the ionic analytes from a bioliquid and has its own actuator for the microfluidic handle.