Influence of high-temperature ion irradiation on nanostructured TiAlN coatings

S. Konstantinov, F. Komarov, Igor V. Chizhov, J. Żuk, V. A. Zaikov
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Abstract

Nanostructured TiAlN coatings were formed on AISI 304 stainless steel substrates by reactive magnetron sputtering. The studied TiAlN coatings were irradiated with Ar+ ions with an energy of 200 keV in the fluence range from 2.5 ⋅ 1016 to 2.0 ⋅ 1017 ion per 1 cm2 at a temperature of 480 °C. Using energy-dispersive X-ray spectroscopy, scanning electron microscopy and X-ray diffraction phase analysis, the elemental composition, structural-phase state and morphology of the initial and irradiated coatings were studied. Nanoindentation of the obtained structures was carried out according to the method of Oliver and Pharr, the nanohardness (Н) and Young’s modulus (E) were determined, and the impact strength of the coatings under study was calculated as the H/E∗ ratio. The formation of a single-phase structure of the (Ti, Al)N solid solution in the coatings initial state has been detected. The effect of selective sputtering of the lightest component – nitrogen – from the coatings was found. Up to an irradiation fluence of 1.0 ⋅ 1017 ion per 1 cm2, no significant changes were revealed in the structural-phase state of the coatings. When irradiated with a fluence of 2.5 ⋅ 1016 ion per 1 cm2, an improvement in the TiAlN coatings strength properties complex was observed. It has been found that nanostructured TiAlN coatings are radiation-resistant up to an irradiation fluence of 2.0 ⋅ 1017 ion per 1 cm2, at which the onset of segregation of the (Ti, Al)N solid solution as the main phase of the coatings and blistering effect is observed. 
高温离子辐照对纳米TiAlN涂层的影响
采用反应磁控溅射技术在aisi304不锈钢基体上制备了纳米TiAlN涂层。在480℃的温度下,用能量为200 keV,影响范围为2.5⋅1016 ~ 2.0⋅1017离子/ 1 cm2的Ar+离子辐照TiAlN涂层。利用能量色散x射线能谱、扫描电镜和x射线衍射相分析,研究了初始涂层和辐照涂层的元素组成、结构相态和形貌。采用Oliver和farr的方法对得到的结构进行纳米压痕处理,测定其纳米硬度(Н)和杨氏模量(E),并用H/E *比值计算涂层的冲击强度。在涂层初始状态下,检测到(Ti, Al)N固溶体形成单相结构。发现了涂层中最轻组分氮选择性溅射的影响。当辐照量为1.0⋅1017离子/ 1 cm2时,涂层的结构相状态未发生明显变化。当辐照量为2.5⋅1016离子/ 1 cm2时,TiAlN涂层的强度性能得到改善。结果表明,当辐照强度为2.0⋅1017离子/ 1 cm2时,(Ti, Al)N固溶体开始偏析,并出现起泡现象。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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