MEMS packaging for reliable resonators and oscillators

B. Kim, R. Melamud, R. Candler, M. Hopcroft, T. Kenny
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引用次数: 4

Abstract

MEMS resonators have been discussed as replacements for quartz crystals in electronics timing applications for more than 40 years. There have been impressive demonstrations of many important characteristics for resonators and oscillators throughout the last 20 years. However, MEMS resonators had always exhibited unacceptable levels of long-term frequency drift. Recent work has shown that placement of MEMS resonators in high-quality packages can eliminate the sources of drift. The emergence of high-quality, low-cost packaging for MEMS resonators has enabled the first demonstrations of long-term stability and opened the door for commercial applications.
用于可靠谐振器和振荡器的MEMS封装
MEMS谐振器作为石英晶体在电子定时应用中的替代品已经讨论了40多年。在过去的20年里,谐振器和振荡器的许多重要特性都得到了令人印象深刻的证明。然而,MEMS谐振器一直表现出不可接受的长期频率漂移水平。最近的研究表明,在高质量封装中放置MEMS谐振器可以消除漂移源。MEMS谐振器的高质量、低成本封装的出现,首次证明了其长期稳定性,并为商业应用打开了大门。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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