All-silicon PIN photodetector based on black silicon microstructure

Q3 Engineering

光电工程 Pub Date : 2021-05-28 DOI:10.12086/OEE.2021.200364

Zheng Zeyu, Luo Qian, Xu Kai-kai, Liu Zhongyuan, Zhu Kun-Feng

引用次数: 1

Abstract

An all-silicon PIN photodetector based on black silicon microstructure is reported. The device combines the characteristics of broad spectrum and high absorption of black silicon structure and the characteristics of high quantum efficiency and high response speed of PIN photodetectors. By adding a black silicon microstructure layer based on the traditional silicon PIN photodetector structure, the response characteristics of the detector in the near-infrared band are improved without affecting the response speed. A method is proposed to solve the contradiction between quantum efficiency and response speed in the vertical structure of the PIN photodetector. The test results show that the quantum efficiency of the device can reach 80%, and the peak wavelength is 940 nm. The light responsivity reaches 0.55 A/W, and the dark current is about 700 pA. The response time is 200 ns.

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基于黑硅微结构的全硅PIN光电探测器

报道了一种基于黑硅微结构的全硅PIN光电探测器。该器件结合了黑硅结构的广谱、高吸收特性和PIN光电探测器的高量子效率、高响应速度特性。在传统硅PIN光电探测器结构的基础上添加黑硅微结构层，在不影响响应速度的前提下，改善了探测器在近红外波段的响应特性。提出了一种解决PIN光电探测器垂直结构中量子效率与响应速度之间矛盾的方法。测试结果表明，该器件的量子效率可达80%，峰值波长为940nm。光响应度达到0.55 A/W，暗电流约为700 pA。响应时间为200ns。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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来源期刊

光电工程 Engineering-Electrical and Electronic Engineering

CiteScore

2.00

自引率

0.00%

发文量

6622

期刊介绍： Founded in 1974, Opto-Electronic Engineering is an academic journal under the supervision of the Chinese Academy of Sciences and co-sponsored by the Institute of Optoelectronic Technology of the Chinese Academy of Sciences (IOTC) and the Optical Society of China (OSC). It is a core journal in Chinese and a core journal in Chinese science and technology, and it is included in domestic and international databases, such as Scopus, CA, CSCD, CNKI, and Wanfang. Opto-Electronic Engineering is a peer-reviewed journal with subject areas including not only the basic disciplines of optics and electricity, but also engineering research and engineering applications. Optoelectronic Engineering mainly publishes scientific research progress, original results and reviews in the field of optoelectronics, and publishes related topics for hot issues and frontier subjects. The main directions of the journal include: - Optical design and optical engineering - Photovoltaic technology and applications - Lasers, optical fibres and communications - Optical materials and photonic devices - Optical Signal Processing