Nonlinear dynamics in dual frequency capacitive discharges

Abstract

This paper proposes an effective nonlinear model which derives from a mathematically demanding spatially resolved model by means of concentrating on the fundamental mode. Based on the obtained mode the interaction of the linear bulk and the nonlinear boundary sheath is analyzed. Comparing the results to traditional linear theory shows that nonlinear effects highly complicate the interaction of bulk and sheath. The low driving frequency as well as the high driving frequency contributes to electron heating within the discharge. It can be shown that this effect of nonlinear electron resonance heating considerably contributes to the total power budget of the discharge. Comparing calculated rf currents with experimentally obtained data provides qualitatively and quantitatively good results.