Design and Simulation of MEMS Based Piezoresitive Pressure Sensor for Microfluidic Applications

2018 Moratuwa Engineering Research Conference (MERCon) Pub Date : 2018-05-01 DOI:10.1109/MERCON.2018.8421908

F. R. Munas, Y. Amarasinghe, P. Kumarage, D. Dao, V. Dau

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引用次数: 3

Abstract

This paper presents the design and simulation of MEMS based piezoresistive pressure sensor for microfluidic applications. Geometrical parameters are very much considerable when designing microstructure of the pressure sensor. Hence, an analysis is carried out by changing the dimensional parameters of three different diaphragm geometries namely square shaped diaphragm, circular shaped diaphragm and cross sectional beam shaped diaphragm respectively. This is performed in three dimensional mesh plots using Matlab. The Finite Element Method (FEM) analyses are performed in COMSOL and by comparing the results, the square type diaphragm is chosen as best diaphragm geometry for the microfluidic applications. In addition, modal analysis is carried out by using Ansys to identify the natural frequency of the best diaphragm geometry. Also Piezoresistive sensing elements are designed and simulated by performing coupled field analysis using COMSOL Multiphysics. Simulation results reveal that piezo resistive square type pressure sensors have high sensitivity in a wide range of pressures.

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基于MEMS的微流体压敏压力传感器的设计与仿真

本文介绍了一种基于MEMS的压阻式微流体压力传感器的设计与仿真。在压力传感器的微结构设计中，几何参数是非常重要的。因此，通过改变三种不同几何形状的膜片即方形膜片、圆形膜片和截面梁形膜片的尺寸参数进行了分析。这是用Matlab在三维网格图中执行的。在COMSOL中进行了有限元分析，通过比较结果，选择方形膜片作为微流控应用的最佳膜片几何形状。此外，利用Ansys软件进行模态分析，确定最佳膜片几何形状的固有频率。利用COMSOL Multiphysics进行耦合场分析，设计并仿真了压阻式传感元件。仿真结果表明，压阻式方形压力传感器在较宽的压力范围内具有较高的灵敏度。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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2018 Moratuwa Engineering Research Conference (MERCon)

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