Optical and Other Measurement Techniques of Carrier Lifetime in Semiconductors

Y. Arafat, F. M. Mohammedy, M. Hassan
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引用次数: 32

Abstract

In this paper, various methods for characterization of semiconductor charge carrier lifetime are reviewed and an optical technique is described in detail. This technique is contactless, all-optical and based upon measurements of free carrier absorption transients by an infrared probe beam following electron-hole pair excitation by a pulsed laser beam. Main features are a direct probing of the excess carrier density coupled with a homogeneous carrier distribution within the sample, enabling precision studies of different recombination mechanisms. The method is capable of measuring the lifetime over a broad range of injections (10 13 -10 18 cm -3 ) probing the minority carrier lifetime, the high injection lifetime and Auger recombination, as well as the transition between these ranges. Performance and limitations of the technique, such as lateral resolution, are addressed while application of the technique for lifetime mapping and effects of surface recombination are also outlined. Results from detailed studies of the injection dependence yield good agreement with the Shockley-Read-Hall theory, whereas the coefficient for Auger recombination shows an apparent shift to a higher value, with respect to the traditionally accepted value, at carrier densities below 2×10 17 cm -3 . Data also indicate an increased value of the coefficient for bimolecular recombination from the generally accepted value. Measurement on an electron irradiated wafer and wafers of exceptionally high carrier lifetimes are also discussed within the framework of different recombination mechanisms.
半导体载流子寿命的光学和其他测量技术
本文综述了表征半导体载流子寿命的各种方法,并详细介绍了一种光学技术。该技术是一种非接触式的全光学技术,基于脉冲激光束激发电子-空穴对后红外探针束对自由载流子吸收瞬态的测量。主要特点是直接探测过量载流子密度,以及样品内均匀的载流子分布,从而能够精确研究不同的重组机制。该方法能够在宽注入范围内(10 13 -10 18 cm -3)测量寿命,探测少量载流子寿命、高注入寿命和俄歇复合,以及这些范围之间的过渡。讨论了该技术的性能和局限性,例如横向分辨率,同时概述了该技术在生命周期测绘和表面重组效果方面的应用。对注入依赖性的详细研究结果与Shockley-Read-Hall理论很好地吻合,而在载流子密度低于2×10 17 cm -3时,俄歇复合系数与传统接受的值相比,明显转向更高的值。数据还表明,双分子重组系数的值比普遍接受的值有所增加。在不同的复合机制框架下,还讨论了电子辐照晶圆和超长载流子寿命晶圆的测量。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
International Journal of Online Engineering
International Journal of Online Engineering COMPUTER SCIENCE, INTERDISCIPLINARY APPLICATIONS-
自引率
0.00%
发文量
0
审稿时长
12 weeks
期刊介绍: We would like to inform you, that iJOE, the ''International Journal of Online Engineering'' will accept now also papers in the field of Biomedical Engineering and e-Health''. iJOE will therefore be published from January 2019 as the ''International Journal of Online and Biomedical Engineering''. The objective of the journal is to publish and discuss fundamentals, applications and experiences in the fields of Online Engineering (remote engineering, virtual instrumentation and online simulations, etc) and Biomedical Engineering/e-Health. The use of cyber-physical systems, virtual and remote controlled devices and remote laboratories are the directions for advanced teleworking/e-working environments. In general, online engineering is a future trend in engineering and science. Due to the growing complexity of engineering tasks, more and more specialized and expensive equipment as well as software tools and simulators, shortage of highly qualified staff, and the demands of globalization and collaboration activities, it become essential to utilize cyber cloud technologies to maximize the use of engineering resources. Online engineering is the way to address these issues. Considering these, one focus of the International Journal of Online and Biomedical Engineering is to provide a platform to publish fundamentals, applications and experiences in the field of Online Engineering, for example: Remote Engineering Internet of Things Cyber-physical Systems Digital Twins Industry 4.0 Virtual Instrumentation. An important application field of online engineering tools and principles are Biomedical Engineering / e-Health. Topics we are interested to publish are: Automation Technology for Medical Applications Big Data in Medicine Biomedical Devices Biosensors Biosignal Processing Clinical Informatics Computational Neuroscience Computer-Aided Surgery.
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