FCCSP IMC growth under reliability stress follows automotive criteria

Q1 Social Sciences
Wei-Wei Liu, Berdy Weng, Scott Chen
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引用次数: 0

Abstract

Purpose The Kirkendall void had been a well-known issue for long-term reliability of semiconductor interconnects; while even the KVs exist at the interfaces of Cu and Sn, it may still be able to pass the condition of unbias long-term reliability testing, especially for 2,000 cycles of temperature cycling test and 2,000 h of high temperature storage. A large number of KVs were observed after 200 cycles of temperature cycling test at the intermetallic Cu3Sn layer which locate between the intermetallic Cu6Sn5 and Cu layers. These kinds of voids will grow proportional with the aging time at the initial stage. This paper aims to compare various IMC thickness as a function of stress test, the Cu3Sn and Cu6Sn5 do affected seriously by heat, but Ni3Sn4 is not affected by heat or moisture. Design/methodology/approach The package is the design in the flip chip-chip scale package with bumping process and assembly. The package was put in reliability stress test that followed AEC-Q100 automotive criteria and recorded the IMC growing morphology. Findings The Cu6Sn5 intermetallic compound is the most sensitive to continuous heat which grows from 3 to 10 µm at high temperature storage 2,000 h testing, and the second is Cu3Sn IMC. Cu6Sn5 IMC will convert to Cu3Sn IMC at initial stage, and then Kirkendall void will be found at the interface of Cu and Cu3Sn IMC, which has quality concerning issue if the void’s density grows up. The first phase to form and grow into observable thickness for Ni and lead-free interface is Ni3Sn4 IMC, and the thickness has little relationship to the environmental stress, as no IMC thickness variation between TCT, uHAST and HTSL stress test. The more the Sn exists, the thicker Ni3Sn4 IMC will be derived from this experimental finding compare the Cu/Ni/SnAg cell and Ni/SnAg cell. Research limitations/implications The research found that FCCSP can pass automotive criteria that follow AEC-Q100, which give the confidence for upgrading the package type with higher efficiency and complexities of the pin design. Practical implications This result will impact to the future automotive package, how to choose the best package methodology and what is the way to do the package. The authors can understand the tolerance for the kind of flip chip package, and the bump structure is then applied for high-end technology. Originality/value The overall three kinds of bump structures, Cu/Ni/SnAg, Cu/SnAg and Ni/SnAg, were taken into consideration, and the IMC growing morphology had been recorded. Also, the IMC had changed during the environmental stress, and KV formation was reserved.
FCCSP IMC在可靠性压力下的增长遵循汽车标准
Kirkendall空洞一直是影响半导体互连长期可靠性的一个众所周知的问题;即使在Cu和Sn的界面处存在kv,也可以通过无偏置长期可靠性测试的条件,特别是在2000次温度循环试验和2000 h的高温储存下。经过200次温度循环试验,在Cu6Sn5和Cu层之间的金属间Cu3Sn层观察到大量的kv。在初始阶段,随着时效时间的延长,这些空洞的增长成正比。本文旨在比较不同IMC厚度作为应力测试的函数,Cu3Sn和Cu6Sn5受热影响严重,而Ni3Sn4不受热和湿影响。设计/方法/方法该封装是在倒装芯片规模封装中设计的,具有碰撞过程和组装。按照AEC-Q100汽车标准进行了可靠性压力测试,并记录了IMC的生长形态。结果:Cu6Sn5金属间化合物对连续加热最敏感,在高温储存2000 h时,其温度从3µm增长到10µm,其次是Cu3Sn IMC。Cu6Sn5 IMC在初始阶段会转变为Cu3Sn IMC,然后在Cu和Cu3Sn IMC的界面处会形成Kirkendall空洞,随着空洞密度的增大,存在质量问题。Ni和无铅界面首先形成并成长为可观察厚度的相是Ni3Sn4 IMC,其厚度与环境应力关系不大,在TCT、uHAST和HTSL应力测试中IMC厚度没有变化。通过对比Cu/Ni/SnAg电池和Ni/SnAg电池,发现Sn含量越高,Ni3Sn4 IMC厚度越大。研究局限性/意义研究发现,FCCSP可以通过AEC-Q100的汽车标准,这为提高封装类型的效率和引脚设计的复杂性提供了信心。这一结果将影响未来汽车包装,如何选择最佳的包装方法和做什么包装的方式。作者可以理解这种倒装芯片封装的公差,然后将凹凸结构应用于高端技术。研究了Cu/Ni/SnAg、Cu/SnAg和Ni/SnAg三种凸起结构,记录了IMC生长形态。同时,在环境胁迫下,地层内压强度发生了变化,KV地层被保留。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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来源期刊
CiteScore
9.40
自引率
0.00%
发文量
23
审稿时长
24 weeks
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