A High Power Circuit Model of an FBAR Resonator for Use in Filter Design

Abstract

FBAR resonators comprise a thin film metal-piezoelectric-metal membrane with an air cavity on either side. Under high power operation an FBAR resonator exhibits a radial temperature distribution. A high power electro-thermal model must incorporate this radial temperature distribution so that it can adequately capture a resonator’s electrical behavior including hysteresis. Prior electro-thermal models, which have been used to model the high-power performance of solidly mounted BAW resonators, assume a uniform temperature distribution in the radial direction, and are thus incompatible for use in modeling FBAR resonators.