Closed-Loop Control of Quasi-Static Scanning PZT Micromirrors with Embedded Piezoresistive Sensing and Spurious Mode Rejection

P. Frigerio, L. Molinari, A. Barbieri, R. Carminati, N. Boni, G. Langfelder
{"title":"Closed-Loop Control of Quasi-Static Scanning PZT Micromirrors with Embedded Piezoresistive Sensing and Spurious Mode Rejection","authors":"P. Frigerio, L. Molinari, A. Barbieri, R. Carminati, N. Boni, G. Langfelder","doi":"10.1109/Transducers50396.2021.9495680","DOIUrl":null,"url":null,"abstract":"The work presents a novel closed-loop control to improve scanning linearity in piezoelectric micromirrors with embedded Lead-Zirconate-Titanate (PZT) actuation and piezoresistive sensing. The system includes two feedback loops aimed at pushing the control bandwidth beyond the microelectromechanical system (MEMS) resonance, at damping the closed-loop quality factor, at nulling the steady-state control error and at rejecting effects of MEMS high-order modes. Overall, the strategy reduces linearity errors down to ± 0.03°, but the latter aspect is particularly challenging: management of spurious resonances is indeed shown to affect the optimal control strategy, suggesting further investigation of predictive feedback techniques.","PeriodicalId":6814,"journal":{"name":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","volume":"77 1","pages":"435-438"},"PeriodicalIF":0.0000,"publicationDate":"2021-06-20","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/Transducers50396.2021.9495680","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3

Abstract

The work presents a novel closed-loop control to improve scanning linearity in piezoelectric micromirrors with embedded Lead-Zirconate-Titanate (PZT) actuation and piezoresistive sensing. The system includes two feedback loops aimed at pushing the control bandwidth beyond the microelectromechanical system (MEMS) resonance, at damping the closed-loop quality factor, at nulling the steady-state control error and at rejecting effects of MEMS high-order modes. Overall, the strategy reduces linearity errors down to ± 0.03°, but the latter aspect is particularly challenging: management of spurious resonances is indeed shown to affect the optimal control strategy, suggesting further investigation of predictive feedback techniques.
嵌入式压阻传感和抑制杂散模式的准静态扫描PZT微镜闭环控制
该工作提出了一种新颖的闭环控制,以提高压电微镜的扫描线性度,该微镜具有嵌入式锆钛酸铅(PZT)驱动和压阻传感。该系统包括两个反馈回路,旨在将控制带宽推到微机电系统(MEMS)共振之外,阻尼闭环质量因子,消除稳态控制误差和抑制MEMS高阶模态的影响。总体而言,该策略将线性误差降低到±0.03°,但后一方面尤其具有挑战性:伪共振的管理确实会影响最优控制策略,建议进一步研究预测反馈技术。
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