An innovative procedure for the synthesis of MEMS capacitive switches

Abstract

This paper is focused on the design of the transmission lines utilized in microelectromechanical capacitive shunt connected switches. These transmission lines sections are employed as matching elements to improve the performance of the component in the on state. The image phase parameter is used to develop an analytic procedure for the synthesis of such transmission lines. The proposed method is applied for the design of a switch, adopting for the capacitive element the experimental data of a microelectromechanical device previously realized by the authors.