Sliding Contact Micro-Bearing for Nano-Precision Sensing and Positioning

Abstract

Applications involving sub-nanometer, relative, in-plane motion between two substrates require precise control of gap-spacing between substrates for, both position-sensing as well as for signal transduction between the substrates. A method of passive gap-spacing control using MEMS-fabricated rigid spacers is proposed. A model to design a low-friction and low-wear interface between the sliding substrates is developed. Prototype parts with hard-coated interfaces and with and without lubrication were fabricated and tested. Sliding friction coefficients of 0.1-0.15 or less and wear life of millions of sliding cycles were achieved on prototype parts. Better results are predicted for MEMS-scale devices.