Influence of the deposition configuration on the composition, structure and morphology of La0.6Y0.07Ca0.33MnO3−δ thin films obtained by pulsed laser deposition

International Journal of Inorganic Materials Pub Date : 2001-12-01 Epub Date: 2001-11-19 DOI:10.1016/S1466-6049(01)00153-2

C Ghica , M Valeanu , L.C Nistor , V Teodorescu , C Sandu , C Ristoscu , I.N Mihailescu , J Werckmann , J.-P Deville

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引用次数: 3

Abstract

We present a structural and morphological study on La_0.6Y_0.07Ca_0.33MnO_3−δ (LYCMO) thin films deposited by laser ablation onto MgO-buffered silicon wafers using two deposition configurations named on-axis and off-axis. All thin films have been deposited at high temperatures in an oxygen atmosphere. A comparative study between the on-axis and off-axis samples is performed by transmission electron microscopy, electron diffraction and energy dispersive X-ray spectroscopy. The films are polycrystalline and show a columnar morphology. The off-axis sample shows a better crystalline texture, although slight compositional variations have been found.

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沉积方式对脉冲激光沉积La0.6Y0.07Ca0.33MnO3−δ薄膜组成、结构和形貌的影响

本文研究了激光烧蚀法在mgo缓冲硅片上沉积La0.6Y0.07Ca0.33MnO3−δ (LYCMO)薄膜的结构和形态。所有的薄膜都是在氧气环境中的高温下沉积的。利用透射电子显微镜、电子衍射和能量色散x射线能谱对轴向样品和离轴样品进行了对比研究。膜是多晶的，呈柱状形态。离轴样品显示出更好的结晶结构，尽管发现了轻微的成分变化。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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International Journal of Inorganic Materials

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