Nanoscience in SEM and TEM: Energy Dispersive X-ray Analysis with High Spatial Resolution

Abstract

The development of modern technology affects the science of small objects in two ways. On one hand better means for handling, imaging and analysis of miniature objects are provided, which means we can try and understand our world on a much smaller scale. On the other hand further miniaturization in manufacturing necessitates the control of technological processes at a minimum of one order of magnitude below the aspired device size. The need for rapid and efficient nanoanalysis is growing very quickly. The next generation 22 nm node in microelectronics architecture is approaching. New solutions for electronic interconnects, capacitors, denser data storage and solar cells are currently under development. This requires atomic scale analysis of a wide range of materials such as functionalized carbon nanotubes (CNTs), various perovskites and three-dimensional nanostructures. Another important field of miniaturization is modern medicine. It strives to identify toxic nanoparticles and transfer medication and operation tools precisely to the place where they are needed in the body. For all of this nanoanalysis is irreplaceable. To understand and control the function of miniature sized natural and artificial objects we need to know their element distribution.