Liping Zhang, R. Ljazouli, P. Lefaucheux, T. Tillocher, R. Dussart, Y. Mankelevich, J. D. Marneffe, S. Gendt, M. Baklanov
{"title":"Damage Free Cryogenic Etching of a Porous Organosilica Ultralow-k Film","authors":"Liping Zhang, R. Ljazouli, P. Lefaucheux, T. Tillocher, R. Dussart, Y. Mankelevich, J. D. Marneffe, S. Gendt, M. Baklanov","doi":"10.1149/2.007302SSL","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":11627,"journal":{"name":"Electrochemical and Solid State Letters","volume":"19 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2012-11-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"33","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Electrochemical and Solid State Letters","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1149/2.007302SSL","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}