High sensitivity pixel technology for a 1/4-inch PAL 430 k pixel IT-CCD

Abstract

A new pixel technology has been developed for a 1/4-inch 430 k (PAL) pixel IT-CCD (Inter-line Transfer Charge Coupled Device). The new pixel has a thin light shield made of tungsten silicide film and an inner-layer optical micro-lens pre-defined by BPSG flow. This process technology can reduce the pixel size to 22.6 /spl mu/m/sup 2/ with improved sensitivity and reduced smear value. The sensitivity is increased by 30% and the smear value is reduced by 6dB compared to a conventional pixel technology. These characteristics are comparable to a conventional 1/3-inch 560 k pixel IT-CCD with the pixel size of 33.6 /spl mu/m/sup 2/.