Evaluation of compatibility of SnO2: CuO thin film based H2S sensor on LTCC substrates

Abstract

Integrated SnO2: CuO thin-film based H2S gas sensor has been realized using low temperature co-fired ceramics (LTCC) tapes with heater and thermister buried inside the LTCC multilayer structure. The SnO2: CuO thin films are deposited on top of the structure. At operating temperature of 180°C, these films revealed sensing properties very similar to the reference films deposited on Alumina substrates. Further, effect of operating temperature on sensitivity was studied and sensor films on LTCC substrate were found to detect H2S with maximum sensitivity at a lower operating temperature of 100°C. The developed sensors have been tested for a period of more than one year and found to show a stable response.