Polysilicon Fuse Electrical Voiding Mechanism AP/DFM: Advanced Patterning / Design for Manufacturability

Abstract

Products in automotive applications demand polysilicon fuse One-time programmable (OTP) solutions with extremely low failure rates. Fundamental understanding of the programming mechanism and key design/programming factors are indispensable to achieving such a goal. This paper presents a real-time poly fuse voiding model supported by electrical waveforms, simulations and physical analysis data. Impacts of fuse design and programming condition changes are also examined.