The study of the influence of field emitter design parameters on emission properties using TCAD simulation

A. Krasyukov, Y. Chaplygin, T. Krupkina, E. A. Artamonova
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Abstract

The study of the influence of field emitter design parameters on electric field and current-voltage characteristics using Sentaurus TCAD simulation was carried out. Electric field distribution and current-voltage characteristics were calculated for single vertically placed carbon nanotubes (CNT) and CNT-bundle. Silicon columnar structures with horizontally placed CNT were also analysed. For vertically placed CNTs it was shown that increase in aspect ratio by reducing the CNT diameter leads to significant increase in emission current. For columnar structures it was shown that maximum electric field near the horizontally placed CNTs much less than the field near the vertically placed CNTs with similar anode-cathode voltages. Emission current is negligible at CNT work function φ>2eV.
利用TCAD仿真研究了场发射体设计参数对发射特性的影响
利用Sentaurus TCAD仿真研究了场射极设计参数对电场和电流-电压特性的影响。计算了单个垂直放置的碳纳米管(CNT)和碳纳米管束的电场分布和电流电压特性。对水平放置碳纳米管的硅柱状结构也进行了分析。对于垂直放置的碳纳米管,通过减小碳纳米管直径来增加长径比可以显著增加发射电流。对于柱状结构,在相同的阳极阴极电压下,水平放置的CNTs附近的最大电场远小于垂直放置的CNTs附近的最大电场。当碳纳米管功函数φ>2eV时,发射电流可以忽略不计。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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