Analysis of capacitive MEMS sensor for small accelerations

Abstract

This paper deals with the theoretical basis for measurement of small accelerations using the miniature capacitive feedback sensor. The sensor itself is non-linear an unstable system. The aim of the paper is to design both stabilizing and feedback control systems to enable measurement of small accelerations. We propose the conversion of acceleration to an appropriate electrical quantity, feedback stabiliser and compensator. Analysis of the precision with its relationship to the controller is also analysed.