N. Luu, Liwei Zhao, Dong Wang, Y. Sugimoto, 杉本 陽平, K. Ikeda, 池田 賢一, H. Nakashima, 中島 英治, H. Nakashima, 中島 寛, ヨウヘイ スギモト, ケンイチ イケダ, ヒデハル ナカシマ, ヒロシ ナカシマ
{"title":"Optimization of Ar-diluted N2 electoron cyclotron resonance plasma for high-quality SiN film growth at low temperature","authors":"N. Luu, Liwei Zhao, Dong Wang, Y. Sugimoto, 杉本 陽平, K. Ikeda, 池田 賢一, H. Nakashima, 中島 英治, H. Nakashima, 中島 寛, ヨウヘイ スギモト, ケンイチ イケダ, ヒデハル ナカシマ, ヒロシ ナカシマ","doi":"10.15017/16717","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":11722,"journal":{"name":"Engineering sciences reports, Kyushu University","volume":"1 1","pages":"1-8"},"PeriodicalIF":0.0000,"publicationDate":"2004-06-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Engineering sciences reports, Kyushu University","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.15017/16717","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
求助内容：
应助结果提醒方式：
京公网安备 11010802042870号
