Sensitivity improvement of multipath optical ring resonators using silicon-on-insulator technology

Abstract

In this paper, a multi-path optical ring resonator (MpORR) on silicon-on-insolator (SOI) is proposed for sensitivity enhancement in liquid chemical sensing applications. It is designed on Silicon Dioxide (SiO2) substrate and Silicon material as the core of optical waveguides. The proposed multi-path optical ring resonator can be realized with a wide free spectral value (FSR) of 3 THz. Therefore, the sensitivity of the sensor can be enhanced. Analysis and optimization of the proposed multi-path optical ring resonator are discussed and reported for optical wavelength operation of 1550 nm. The proposed device can be used for identifying different liquid material precisely.