Backscattered electrons from X-ray target

Abstract

X-rays are radiated from a target when an electron beam is accelerated and collides it. When high energy electrons struck a metal target, significant backscattered electrons could be generated and reduce the image sharpness. This paper will describe the Monte Carlo algorithm to analyze backscattered electrons in Beam Optics Analyzer (BOA) and present simulation results of an X-ray tube. The results will be compared with experimental data.