Towards the development of a frequency agile MEMS acoustic sensor system

Abstract

Designing acoustic sensors with adaptable frequency responses is of great interest in order to deal with diverse application requirements. A bio-inspired acoustic concept exploiting frequency agility using a MEMS microphone front-end is presented. Simulations and experimental results show adaptations of the microphone's acoustic frequency response according to applied DC voltage potentials. Finally, the microphone is demonstrated as part of an integrated adaptive frequency sensor feedback loop. Such acoustic sensor systems can be used in many applications requiring high frequency discrimination and agile tuning.