Design and Fabrication of Flexible and Transparent Piezoelectric Micromachined Ultrasonic Transducer Based on Mica Substrates

Abstract

Piezoelectric micromachined ultrasonic transducers (PMUTs) with features of flexibility or transparency have excellent prospects for curved surface imaging, biological sensors and wearable electronics. In the paper, a flexible PMUT based on unique mica substrate has been fabricated by thermal release transfer printing technique. In this fabrication process, a three-dimensional PMUT structure was picked up and transferred onto a mica substrate without using additional sacrificial layer or suspended architectures. The preliminary experimental results demonstrate that the proposed mica based PMUT has excellent flexibility and high transparency.