A Stacked p‐Type Low‐Temperature Polycrystalline Silicon Thin‐Film Transistor for Future Display Applications

Yu‐Xuan Wang, Mao‐Chou Tai, T. Chang, Chia-Chuan Wu, Yu-Zhe Zheng, Yu-Fa Tu, Kuan-Ju Zhou, Yu-Shan Shih, Yu-An Chen, Jen-Wei Huang, S. Sze
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Abstract

In this study, a novel structural design of the p‐type low‐temperature polycrystalline silicon thin‐film transistors (p‐type LTPS TFTs) applied to the pixel structure of displays is proposed. Compared to the conventional pixel structure of displays, the proposed architecture can achieve the aperture ratio improvement by stacking the switch thin‐film transistor and the storage capacitor in a pixel region to enlarge the active space. Therefore, the demands of high‐resolution characteristics, such as a high aperture ratio, and high pixel densities for high‐end displays or novel technologies, can be satisfied by the adoption of the proposed design concept. Furthermore, the discussion of experimental and simulated results in terms of device physics of the transistor indicates that proposed TFTs possess higher performance and reliability properties. By modulating the geometry of the drain‐connected bottom metal in stacked TFTs, output characteristics and hot carrier phenomenon in devices can be further improved. Time‐dependent transfer characteristics, extracted electrical parameters, and numerical simulation results are performed to support our design.
用于未来显示应用的堆叠p型低温多晶硅薄膜晶体管
在这项研究中,提出了一种新的结构设计的p型低温多晶硅薄膜晶体管(p型LTPS TFTs)应用于显示器的像素结构。与传统的显示器像素结构相比,该结构通过在像素区域内堆叠开关薄膜晶体管和存储电容来扩大有源空间,从而实现了孔径比的提高。因此,采用所提出的设计概念可以满足高端显示器或新技术对高分辨率特性的需求,例如高孔径比和高像素密度。此外,从器件物理的角度对实验和仿真结果进行了讨论,表明所提出的晶体管具有更高的性能和可靠性。通过调制堆叠TFTs中漏极连接的底部金属的几何形状,可以进一步改善器件的输出特性和热载子现象。时间相关的传输特性,提取的电气参数和数值模拟结果进行了支持我们的设计。
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