Эффективность возбуждения центров дислокационной люминесценции в кремнии с кислородными преципитатами

Abstract

Effect of the pump power on the photoluminescence intensity for dislocation-related luminescence centers is studied in p-type silicon containing oxygen precipitates. Oxygen precipitates are induced as a result of three-stage annealing used for formation of a getter for fast diffusing impurities in microelectronics technology while D1 and D2 dislocation-related luminescence centers were produced during subsequent annealing in a flow of argon at 1000°С. The photoluminescence excitation efficiencies for the D1 and D2 lines were measured at a temperature of liquid helium.