Investigation of surface boundary conditions for continuum modeling of RF plasmas.

Althea Wilson, B. Shotorban
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引用次数: 7

Abstract

This work was motivated by a lacking general consensus in the exact form of the boundary conditions (BCs) required on the solid surfaces for the continuum modeling of RF plasmas. Various kinds of number and energy density BCs on solid surfaces were surveyed and how they interacted with the electric potential BC to affect the plasma was examined in two fundamental RF plasma reactor configurations. A second-order local mean energy approximation with equations governing the electron and ion number densities, and the electron energy density was used to model the plasmas. Zero densities and various combinations of drift, diffusion and thermal fluxes were considered to set up BCs. It was shown that the choice of BC can have a significant impact on the sheath and bulk plasma. The thermal and diffusion fluxes to the surface were found to be important. A pure drift BC for dielectric walls failed to produce a sheath.
射频等离子体连续体模型的表面边界条件研究。
这项工作的动机是对射频等离子体连续体建模所需的固体表面边界条件(bc)的确切形式缺乏普遍共识。在两种基本的射频等离子体反应器结构中,研究了固体表面上各种数量和能量密度的BC,以及它们与电势BC相互作用对等离子体的影响。用控制电子和离子数密度和电子能量密度方程的二阶局部平均能量近似来模拟等离子体。考虑了零密度和漂移、扩散和热通量的各种组合来建立BCs。结果表明,BC的选择对鞘层和体等离子体有显著影响。表面的热通量和扩散通量被发现是重要的。介质壁的纯漂移BC不能产生护套。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
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