Apodized and un-apodized sidewall grating filters with low coupling constants in ultra-low-loss Si3N4 planar waveguides

M. Belt, M. Heck, J. Barton, J. Bauters, J. Bowers, D. Blumenthal
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Abstract

We demonstrate apodized and un-apodized sidewall grating filters in an ultra-low-loss planar Si3N4 integration platform. Record low coupling constants, as low as 0.19 cm-1, and better than 5dB side-lobe suppression with apodization are reported.
超低损耗氮化硅平面波导中低耦合常数的消角和未消角侧壁光栅滤波器
我们在一个超低损耗的平面Si3N4集成平台上展示了去顶和未去顶的侧壁光栅滤波器。据报道,该系统的耦合常数低至0.19 cm-1,并具有优于5dB的旁瓣抑制效果。
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