Low-temperature properties of niobium oxynitride thin films prepared by non-balanced magnetron sputtering

Abstract

The results of phase composition, low temperature resistive measurements of nanodimensional superconductive niobium oxynitride are presented. The non-stoichiometry niobium oxynitride samples were fabricated by non-balanced magnetron sputtering. We obtained nanocrystalline thin film samples with narrow range of superconductive transition near 0, 3 K and transition temperature near (7, 6–8, 0)K.