Efficient analysis of periodic structures in microacoustic devices

Abstract

Periodic structures utilized as transducer or reflector elements play an important role in microacoustic wave devices. Such structures can be described using approximate analytical models. However, to obtain the accuracy required for reliable device simulation, numerical methods have to be employed. In this contribution we present an efficient numerical approach to calculate the dispersion curves associated with microacoustic modes propagating in periodic structures. The computational efficiency is related to the utilization of the Fast Fourier Transform (FFT) algorithm in a hybrid Method of Moments (MoM)/Mode Matching analysis. From the obtained dispersion curves characteristic parameters such as the stopband width can be obtained which can be used in a coupling-of-modes model of the structure.