The Use of Capacitive Micromotors as Micropositioning Devices

Abstract

The paper shows the relevance of using mechatronic devices with microelectromechanical capacitive transducers, based on the effect of electrostatic overlap of a film element. The principle of operation, the basic laws of micromotors, the main directions of the development of microelectromechanical systems in medicine are described in the work. Tthe application of low-power emission mechanisms in microdosing systems is considered.