{"title":"Molecular Beam Epitaxy of AlGaN Nanowires for Ultraviolet Light Emitting","authors":"S. Zhao, J. Lu, Y. Zhong","doi":"10.1109/NANO51122.2021.9514283","DOIUrl":null,"url":null,"abstract":"In this work, we discuss the molecular beam epitaxial growth of AlGaN nanowires on Si for ultraviolet light emitting. It is found that, although using a relatively low substrate temperature, AlGaN nanowires with different Al contents can still have a reasonably good optical quality. The reduced substrate temperature could favor the development of electrically injected ultraviolet light emitting devices.","PeriodicalId":6791,"journal":{"name":"2021 IEEE 21st International Conference on Nanotechnology (NANO)","volume":"77 1","pages":"403-404"},"PeriodicalIF":0.0000,"publicationDate":"2021-07-28","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 IEEE 21st International Conference on Nanotechnology (NANO)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NANO51122.2021.9514283","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In this work, we discuss the molecular beam epitaxial growth of AlGaN nanowires on Si for ultraviolet light emitting. It is found that, although using a relatively low substrate temperature, AlGaN nanowires with different Al contents can still have a reasonably good optical quality. The reduced substrate temperature could favor the development of electrically injected ultraviolet light emitting devices.