Design of ESD protection device using statistical methods

Abstract

This paper describes an ESD protection device design to minimize its area A/sub p/ while maintaining the breakdown voltage V/sub ESD/. Hypothesis tests were performed to find the applied surge condition and to select control factors for the design-of-experiments (DOE). Also, TCAD was used to estimate V/sub ESD/. An optimum device structure, where a salicide block was employed, was found using statistical methods and TCAD.